Abstract
The performance of some machine essentially depends on actuators. But, the processes of micro sized structures are very difficult. On the other hand, the LIGA process can be used to fabricate nano- and micro- scale structure. Then, we have manufactured a nine part operation expose stage. Thus, this exposure stage has made three-dimensional deep X-ray lithography possible. With this technique, we have fabricated a high aspect ratio coil for solenoidal electromagnetically driven actuators. By using this technique, a coil consisting of 10μm lines and spaces with an aspect ratio of about 5 can be manufactured. This actuator is expected to provide enhanced output suction force, in spite of miniature size.
