Abstract
Micropumps are required in various applications including cooling systems for microelectronic devices, and fluid power systems for microactuators. Electro-conjugate fluid (ECF) micropumps have attracted attention due to its simple structure and high output power density. According to previous research, the ECF micropump tends to increase its power density when size of electrodes decreases. However, it is difficult to fabricate smaller electrodes whose height maintains. We developed mini-like TPSE to investigate the characteristics of ECF micropumps with smaller electrodes using the MEMS fabrication process of relatively larger electrode structures. In order to overcome larger flow resistance in mini-like TPSE, we propose triangular prism - tapered slit electrodes pairs (TPTSE). Electrode gaps of 200μm, 100μm and 50μm were been fabricated successfully using the MEMS technology. The experimental results proved that the higher flow rate could be obtained in TPTSE. It is concluded that their ECF micropump has the potential to generate the higher output power density.
