Clarification of deformation behavior of vertically aligned carbon nanotube film for the TIM use

Abstract

CNT is an elongated tube of nanoscale. It has excellent flexibility and thermal conductivity. The CNT film which is produced by the SiC surface decomposition method is referred to as "Vertically Aligned CNT film". This film has features such as vertical alignment, high directivity, high density and high adhesion. So that, it is considered to be able to acquire a high contact area ratio and high heat transfer coefficient by sandwiching this film between solid contacts. We observed the surface shape, using a laser microscope, AFM and FESEM. In addition, I found the relationship between displacement and contact pressure using a nanoindentation tester. Thereby I check the deformation behavior of the Vertically Aligned CNT film.