Abstract
In this study, a micro-actuator was designed to produce the high pressure using the electrostatic force and the evaporation of the working fluid. The dielectric liquid of HFE-7100 was used as working fluid. The electrostatic force was induced at interface between the liquid and air by the application of high electric field, and the vapor pressure was produced by the application of heat. The maximum pressure induced by the electrostatic force was 1000 Pa with the application of electric field, 7 kV/mm. Also, the maximum pressure induced by the evaporation of the liquid showed 1000Pa with the application of calories, more than 3.50 W. The pressure induced by the both the electrostatic force and the vapor pressure was 1200 Pa with the application of electric field, 4 kV/mm, and of the calories, 3.65 W.
