J111024 Measurement of local rheological properties by using a dual-axis friction-force-microscopy probe with an electrostatic actuator

Abstract

By using a dual-axis probe with an electrostatic actuator for friction force microscopy, a new method for measuring the local properties of micro/nano textured surfaces. In this probe, the lateral and vertical forces are measured without interfering with each other, by detecting the lateral and vertical forces with the double-cantilever and torsion beams, respectively. The micromachined electrode part can provide an electrostatic actuator that drives the probe laterally. This method successfully revealed the local rheological properties of the chemically patterned lubricant film on the 10-μm scale.