Abstract
In the conventional sensor using localized surface Plasmon resonance, the metallic particle has only allocated on substrate in two dimensions. We attempted that Gold nanoparticles allocated on the substrate in three dimensions were fabricated by growing CNTs on the Si substrate by the CVD method, and modifying gold nanoparticles by the PVD method. Concretely, we fabricated High density and low density CNTs on the substrate by the CVD method, and modified gold nanoparticles to each CNTs by thermal deposition and vacuum deposition. Evaluation of applicability to bio-sensor was carried out by using protein absorption. BSA of 0.1g/1 as a protein was applied to the absorption test. Absorption spectra of before and after were compared by the LSPR analysis. After BSA adhesion, a spectrum shift to the infrared region was seen in low density CNTs that gold nanoparticle was modified by thermal deposition.
