Abstract
Water driven stage was developed for linear stage of ultra-precision machine tool. Feed motion of the single point diamond cutting tool is, for instance, generated by the water driven stage. The water driven stage is composed of water hydrostatic bearings and water hydraulic piston mechanism. In order to obtain fine diamond turned surfaces, a constant feed motion of the stage is needed to obtain fine and smooth finishing surfaces. In order to design effective speed control system of the stage, the paper considers a mathematical model of the stage. The flow resistance of the gap between the piston and cylinder is first examined by experiment as well as calculation. Dynamic characteristic of the stage is then investigated by the step response method. The experimental result shows that the dynamic characteristics can be modeled by the second order system, though the derived mathematical model is the first order model.
