J111036 Detecting Method2 of Bulk Defects of DLC Film Using Light Scattering

Abstract

Diamond-like carbon (DLC) film has various micro-size defects like pinhole, void and particle. These defects cause a decrease in not only mechanical but also gas-barrier performances of DLC film. When DLC film is exposed to white light, light is scattered in all the direction at defects in DLC film. In this paper, bulk defects in DLC film that was deposited by plasma chemical vapor deposition (CVD) are detected by observing scattering light from defects under dark-field microscope. DLC film has wavelength dependence of transmittance. By applying this dependence to detecting method, we attempted to separate surface defects from inside defects of DLC films.