J161012 Characterization of an electret comb-drive actuator as an energy harvesting device

Abstract

We have been developing an electret comb-drive actuator that employs silicon oxide film as an electret material. Here in this time, we will report on electrical characterization of the electret comb-drive actuator as a power generator. We measured velocity and the short circuit current simultaneously, and obtained 1.12 mC/m2 effective charge with 100 V built-in potential. In addition, we could charge 10 μF electrolytic capacitor up to 0.4 V from electric generation experimen