Abstract
Fabrication of a MEMS cantilever structure with magneto-strictive film has been studied for application of magnetic sensor using magnetostrictive effect. Micro cantilevers of FePd (4 (μm) / Si (10 μm) were fabricated from an SOI (silicon on insulator) substrate by MEMS fabrication processes. The fabricated cantilevers were successfully deflected by magnetostrictive effect. When magnet flux was lower than 30 Gauss, cantilevers with a length of 1000-2000 μm were deformed with sensitivities of 0.015-0.06 μm/Gauss. The sensitivity increased with increasing magnet flux. When magnetic flux was higher than 150 Gauss, the cantilevers deflection was reduced, due to an effect of magnetic force.
