Abstract
To prevent the spread of the infectious disease, the rapid detection and analysis of a virus and bacteria is required. Therefore, the reaction speed and detection sensitivity can be improved by increasing the specific surface area of the reaction field, such as adding a three-dimensional structure in micro reaction field. In this study, we applied Vertically Aligned Carbon Nanotubes (VA-CNTs) using Chemical Vapor Deposition (CVD) as three-dimensional structure. Because CNTs have high chemical stability and nanostructures with high aspect ratio which brings high specific surface area, it is suitable for three dimensional structure of micro reaction field. The purpose of this study is to control the density of the CNTs from growth stage by controlling the dispersion of metal catalyst particles on the substrate. We took advantage of the fact that CNTs grow on metal catalyst particle for density control of CNTs The density control of CNTs was carried out by dip coating of catalyst precursor solution and CVD method. As result, we have succeeded in the synthesis of the pillar structure of CNTs that has diameter of 2 μm, distance of 4 μm and length of 10 μm. Specific surface area of this study is increased to 5.4 times in comparison with micro reaction field without VA-CNTs. From this result, we expect to improve reaction sensitivity and speed when this substrate will be apply to bio analysis.
