Abstract
Properties of chemically textured surfaces on the small scale are difficult to measure. Measurement of local friction can provide properties of textured surfaces. Friction force microscope (FFM) is widely used for measurement of local friction properties. A recently developed actuated dual-axis probe, called micro mechanical probe (MMP), can provide friction force measurement at wider range of sliding speeds. In this paper, the actuated probe was applied to quantification of friction damping mechanism of chemically textured surfaces on the micro scale by measuring the sliding-speed-dependence of friction force, which can provide properties of chemically textured surfaces.