In the 2011 Great East Japan Earthquake, serious damage occurred in power plants and industrial facilities. The Japan Society of Mechanical Engineers (JSME) has set up an investigation committee and investigated the seismic damage of mechanical equipment in these industrial facilities for the purpose of understanding the situation and causes of the damage in such facilities and improving of preparedness for the future earthquakes. From the questionnaire investigation and many site investigations, it is found that the damage of industrial facilities was mainly caused by one of the following causes or a combination of thereof "strong seismic motion", "soil deformation", and "tsunami". In the questionnaire investigation, many organizations mentioned that the means of communication and provisions for electrical outages/shortages should be improved in the future tasks. Although the earthquake caused a great deal of damage, seismic measures taken before the earthquake could mitigate damage of some facilities.