Abstract
When a biodegradation plastic is used as a substrate, ion beam irradiation produces thermal damage through a combination of low heat resistance and thermal shrinkage due to weak adhesion between the base material and the metal thin film. The formation of a reforming layer is expected to improve adhesion between biodegradable plastic and thin film. Reforming layer formed to deep range by He^+ ion beam irradiation. Or reforming layer formed to shallow range by Ar^+ ion beam irradiation. Energy to give the substrate surface by He+ is low, because forming density of reforming layer is lower than Ar^+. On the other hand, energy to give the substrate surface by Ar^+ is high, because degradation of the substrate surface falls for a short time. And, it is possible that while a think stable reforming layer is formed in a surface neighborhood. In this study, the reforming layer were formation by ion beam irradiation of different ion species on biodegradable plastic surface, the metal thin film adhesion was examined. Then, it was used that Argon and Helium as ion species and Titanium as metal species. The results of study clearly demonstrated that Ti thin film adhesion can be enhanced by the presence of a reforming layer. Furthermore, it was clearly that a Ti thin film adhesion excels under the terms of large-radius Argon gas ion.
