Abstract
In this study, temperature measurement and visualization around a heated disk set in tubular channel have been investigated to understand heat transfer in a reactor of chemical vapor deposition (CVD). A distance between an exit of gas supply and the disc was changed from 10mm to 50mm as same as general CVD reactor. A diameter of tubular channel and a diameter of the disk were 100 mm and 60 mm, respectively. An air flow rate was changed from 2 L/min to 20 L/min. When the distance was 10mm, a gas flow pattern showed the stagnation flow around the disk even if the flow rate was 2L/min. On the other hand, when the distance was 50mm, the gas flow pattern showed unsteady flow with natural convection. These flow patterns could be divided on a graph of a relationship between Reynolds number and Grashof number. From the temperature measurement parallel to the heated disk, Nusselt number distribution was calculated. Furthermore, the relationship between Nusselt number and gas flow pattern has been investigated.
