J045072 Evaluation of Piezoelectric Constants of Thin Films Using Forced Vibration Response of a Beam

Abstract

An estimation method of the piezoelectric constants of thin films bonded on one surface of the beam was investigated. At first, theoretical analysis was carried out and equations of motion of the beam and sensor output equations were derived. Then, forced vibration responses of the beam are calculated under the condition that the system is harmonically excited. Piezoelectric d_<31> constants were estimated from the displacement response of the beam and the output voltages of the piezoelectric films.