Abstract
Tungsten-containing diamond-like carbon (W-DLC) coatings designed for the purpose of producing new strain sensor was fabricated by chemical vapor deposition and DC magnetron co-sputtering of a tungsten metal target. The electrical resistance was measured by four-terminal method and shown to be proportional to the value of compression and tensile strain. The expression ΔR/R=Kε was applied to the experimental results in order to determine the gauge factor of each coating. The W-DLC coating showed the performance equivalent to the commercial strain gauge.
