G0100101 Effect of Mass Flow Induced by a Reciprocating Paddle on Electroplating

Abstract

In this paper, the mass flow induced by a reciprocating paddle in the electroplating cell is studied by the finite element analysis software-COMSOL multiphysics. The reciprocation of the paddle is simulated by moving mesh (Arbitrary Lagrangian Eulerian: ALE method) and the solution of paddle agitating fluid dynamics is coupled into the calculation of tertiary current distributions. The reciprocating frequencies are 0.5, 1, and 2 Hz. An acid copper sulfate electrolyte composed of 50 mM CU_2SO_4 and 0.5 M Na_2SO_4 is taken into account. The results shows that the reciprocation of the paddle could effectively improve the concentration distribution of cupric ions and the current density distribution on the cathode surface.