Abstract
We have proposed a method for tensile-mode fatigue testing of micro structures of single crystal silicon (SCS). For reliable measurements of fatigue property of SCS, a large number of cyclic loadings (10^6〜) and a sufficient number of measurements are necessary for statistical analysis, which requires very long measurements using tensile-mode fatigue testing, because the loading frequencies in reported tensile-mode fatigue testing are usually lower than 100 Hz. To shorten measurements, the proposed method conducts parallel measurements of testing structures. Arrayed testing structures with integrated piezoresistive strain gauges are subjected to tensile-mode fatigue testing simultaneously actuated using a piezoelectric stage. Because of the strain gauges with a linear and low noise output and a simple readout circuit, simultaneous measurement is realized. Designs of the testing structures and the strain gauges were reported, which allows us to use the piezoelectric stage and realizes quick measurements with higher test frequency.
