Abstract
We proposed a microvalve using photoprocessible thremoresponsible gel, which is called "Bioresist". Bioresist has characteristic of shrinking higher than 32 degree Celsius and swelling lower than 32 degrees. The volum change is utilized for opening and closing the microvalve. Since Bioresist is patterned, we can fabricate any arbitrary 2D shape of Bioresist using photolithography. We developed a microvalve which can control opening and closing by integrating the patterned Bioresist with a microheater using MEMS technology. The microvalve using Bioresist hasthe advantage of high speed response and low power consumption. We evaluated the relationship between applied current required for opening the microvalve and flow rate when microvalve were tested under regular pressurized flow with de-ionized (DI) water. As a result, flow rate is proportional relationship with applied current. It was shown controllability of flow rate by applied current.
