Abstract
In the field of research work of micro devices, from 1990 upto today we have been engaed in studying the fabrication technologies, such as surface micro machining, bulk micro machining and molding. According a series effort by reesarcher in the field of electric engineering, mechanical engineering and bio engineering, the micro devies have given a fruitful result to indusries, economy and society. Looking back on a long history of engineering, fabrication technique using an existing material, and after that material development is necessarily for improuving and designing the devices and machines. As a member of mechinical engineering society and a researcher in the micro devices, we should think about out future research work.
