Thermal imaging device based on IR-to-visible convertion using temperature sensitive phosphor

Abstract

This paper reports optical read-out thermal imaging devices based on IR-to-visible conversion technique using temperature sensitive phosphor (Eu(TTA)₃). Infrared emit from the observation object induces temperature change of a thermally isolated microstructure, of which the temperature can be read out by the luminescence intensity of Eu(TTA)₃. Two types of imaging devices were fabricated and evaluated, one of which was made of vacuum deposited Eu(TTA)₃ on a deep reactive ion etched thermal isolation structure, and the other was made using photo-patternable temperature sensitive paint combined with a transfer method. Both device can detect the temperature distribution, however the device using vacuum deposited Eu(TTA)₃ had a better performance which can detect a human.