Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : September 03, 2017 - September 06, 2017
Magnetostrictive materials are applicable to various types of sensors. In order to increase the resolution of the sensor, materials with high magnetostriction amount and relative permeability are required and Fe-Ni-Cr alloys are expected to have excellent magnetic properties. For searching materials with ideal properties, combinatorial search is one of the effective method. In this study, integrated SOI-MEMS device for combinatorial search is fabricated. This device is designed to perform combinatorial search of magnetostriction amount and relative permeability of Fe-Ni-Cr alloys.
