Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : September 13, 2020 - September 16, 2020
In the early stage of deposition of metallic films, island-like clusters are formed on the substrate. As the deposition proceeds, the clusters grow, contact each other, and form a continuous film. This morphological transition is expected to be affected by the experimental conditions such as the substrate temperature. However, the morphological transition is difficult to observe during the deposition. In this study, we developed a method for observing the transition of a metallic thin film on a heated substrate by using the piezoelectric resonance. By using this method, we observed the morphological transition of Pd films on silica glass substrates at high temperatures. As a result, it was found that the timing of the transition depends on the substrate temperature. It was also suggested that the differences in the transition originate from the difference in the cluster size at high temperatures.
