Synthesis of Silicone Films Using Atmospheric Pressure Micro Plasma Jet by Rectangular Nozzle with Three Layered Structure

Abstract

An atmospheric pressure micro plasma jet is a jet state of low temperature thermal nonequilibrium plasma using a discharge tube nozzle. This plasma jet is applied to various fields such as medical care, and has attracted attention in recent years. The purpose of this study is to apply atmospheric pressure micro plasma jet by rectangular nozzle with three layered structure to synthesis of silicone films. As a method, cyclic siloxane (D5) as a raw material is mixed with helium, and chemical reactions to form film precursors are generated in respective plasma fields generated in three layers in a discharge tube nozzle, and these are jetted onto the target substrate to synthesis a silicone film. In this study, we succeeded in this method and clarified its characteristics.