Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : September 11, 2022 - September 14, 2022
In order to develop a highly-sensitive small-scale tactile sensor, piezoresistive effect of graphene nanoribbon was applied to the sensor. It was confirmed that the graphene nanoribbon narrower than about 70 nm showed semiconductive properties and thus, large piezo-resistive constant. The dumbbell shape was applied to the stable junction between metallic graphene and semiconductive graphene. It was easy to form stable ohmic contact between the metallic graphene and metallic electrode. An area-arrayed nanoscale GNR structure with varying width was fabricated for a highly sensitive tactile sensor. Graphene was synthesized inside a copper pocket using a low-pressure chemical vapour deposition (LP-CVD) method. PMMA- assisted wet transfer process was used to transfer graphene grown on the copper to the target substrate. Then, the electrodes were deposited using electron-beam deposition. A four-point bending test was carried out on the sensor to determine the piezo-resistive effect of the DS-GNR. Finally, the gauge factor was determined under the application of various amounts of strain.
