Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : September 11, 2022 - September 14, 2022
It has been reported that ta-CNx coatings deposited by the IBA-FAD method show excellent low friction and wear properties, however the hardness decreases with the N/C ratio in the coating. Although, using an ion gun to mix nitrogen in the coating gives several pros to the coating, however, it rises initial cost of equipment. To overcome this situation, nitrogen ion generation by just supplying nitrogen gas close to an arc discharge area which is used in the FAD carbon ion generation was suggested by authors. The supplied nitrogen gas is ionized by the high voltage arc which is supplied to a graphite target. The effects on the N/C ratio was measured by AES, hardness was measured by nano-indentation tester, and tribological properties of the deposited ta-CNx coatings were examined. The results showed that ta-CNx coatings deposited by nitrogen gas supply method showed higher hardness than ordinally nitrogen ion beam deposition method.
