Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : September 03, 2023 - September 06, 2023
Molybdenum disulfide (MoS2), a layered material, has long been used as a self-lubricating solid material due to its low surface energy. In a previous study, about 20 layers of MoS2 were successfully formed by mist CVD at 400°C under atmospheric pressure, but α-MoO3 formation was also observed at the same time, and suppression of oxidation was identified as an issue. The study also indicated the need for fine control of the number of layers for the introduction of MoS2 into nano-scale mechanical systems. In this study by mist CVD, we succeeded in eliminating α-MoO3-derived peaks and improving the crystallinity of MoS2 by introducing a cooling process in which cooling is performed in an N2 gas atmosphere. In addition, by precisely controlling the flow rate of the carrier gas of the mist, we succeeded in controlling the number of layers from the bulk to two or three layers. Furthermore, by introducing NaCl as a supporting agent, the formation of MoS2 became possible with a very small amount of material supply, and the deposition efficiency was successfully improved.
