Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : September 03, 2023 - September 06, 2023
This study presents the development of a MEMS piezoresistive cantilever-type differential pressure sensor and its applications. We originally developed the differential pressure sensor to measure the aerodynamic force on the wing surface of a butterfly. The developed sensor was 1.0 mm x 1.0 mm x 0.3 mm in size and realized a pressure resolution of less than 0.1 Pa. A differential pressure of ±10 Pa was measured using the sensor during the spangle butterfly's takeoff. The sensor met the required high sensitivity, small size, and unbreakable specifications due to the special conditions of measuring by attaching to the butterfly's wing surface. As a result, it was deployed in other applications. For example, by attaching a chamber to the underside of the differential pressure sensor, the sensor worked as an atmospheric pressure change sensor, altimeter, and infrasound sensor. Furthermore, the sensor was utilized as a compact airflow sensor by integrating it into housings fabricated by a 3D printer.
