Abstract
Fluidic behavior on a sub-micron sized channel is examined using a grooved quartz plate named "nano-channel". The quartz channel was fabricated by a fast atom beam etching, and was covered with a quartz lid by an HF adhesion. Pressure loss through the channel was measured using a small pressure sensor; water flow at 50μl/hr needs 450kPa loss through a 0.5x0.25x10μm channel.
