Recovery behavior of Ni-Ti Shape Memory Alloy Thin Films

Abstract

In recent years, electronic devices are miniaturized, and we wish to develop microactuator. Ni-Ti shape memory alloy is a material adapted to micro actuator as it can keep high power/weight ratio if it's miniaturized. So, a lot of studies have researched on this field. But, the research on the performance of thin films for actuator specifically did not reported frequently. Therefore, in our study, we researched recovery behavior of Ni-Ti shape memory alloy thin films; it is important for its practical application into microactuator to research on recovery force and response behavior.