The proceedings of the JSME annual meeting
Online ISSN : 2433-1325
2000.3
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Fabrication and Evaluation of the AFM Observation System of Thin Film under Tensile Stress
Yohei FUJIMOTO, Kimiharu KAYUKAWA, Akihito MATSUMURO, Kazuo SATO
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Keywords: Tensile stress, Thin film, AFM, TiN
CONFERENCE PROCEEDINGS RESTRICTED ACCESS

Pages 365-366

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© 2000 The Japan Society of Mechanical Engineers
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