Abstract
To satisfy industrial requirements for a table system, such as high speed drive and accurate positioning, linear motor driven aerostatic table systems are increasing. In this paper, to realize nanometer order tracking accuracy and high speed feed drive of a table system, an application of a learning control method was investigated. And through a series of driving experiments, it was proved that a leaning control method can restrain tracking error caused by many factors such as force ripple of the linear motor.
