Abstract
A new position surveying micromachine structured by a driving microrobot and a position surveying sensor micromachine is fabricated. The driving microrobot is an inching worm type microrobot driven by the pneumatic pressure. Position surveying sensor is done by using of two rotary encoder sensors. The position surveying micromachine could measure the position at the accuracy less than 1.5 degrees in the angle and less than 600mm in the position in a plastic pipe which has curvature of 40 degrees in its center and is 6850mm long and 44mm in inner diameter.
