Evaluation of mechanical property of porous silicon thin film

Abstract

Porous silicon was examined as a material for micromachining. A micro resonator was fabricated with porous silicon membrane formed by anisotropic etching of a silicon wafer. The resonator was excited using a laser beam irradiation and the vibration was detected by measuring intensity fluctuation of He-Ne laser beam reflected on the resonator mass. The resonant frequency was determined from the resonant characteristics. Young's modulus was calculated using measured value of the resonant frequency.