Fabrication and Evaluation of Diamond-Like Carbon Film Temperature Sensor with Nano-composite Metal Cluster

Abstract

This paper describes temperature dependency of electric resistance of metal nano-composite DLC (Diamond-like Carbon) film considering its application to temperature sensors. DLC has many attractive properties such as low friction, low wear resistivity, chemical inertness etc. Few reports have shown the application for the temperature sensors of DLC film. We fabricated metal (Chromium) containing DLC (Metal nanocomposite DLC : Me-DLC) film and measured the temperature dependency of electric resistivity. After measuring temperature dependency we evaluated relation between the composite atomic concentration (C, O, Si, Cr) and resistivity of Me-DLC film.