Pages 301-302
Double-sided polishing is widely applied to obtain extreme flatness in thin workpieces. The polishing, however, has problem relating to roll off due to the deformation of polishing pads. In this study, a four body finishing utilizing polymer particles, that is, a pad-free polishing is introduced to overcome the above-mentioned problem. A series of experiments revealed that the surface quality and the polishing efficiency are comparable to those obtained by conventional polishing and that the flatness is significantly improved. Furthermore, it was found that the surface roughness of tool plate and the thickness of carrier have important effects on polishing performances.
