Abstract
In recent years, a precision positioning technology involving an air-lubricated bearing has become indispensable in various fields of semiconductor manufacturing, measuring instruments, life engineering and so forth. Thus, the precision level at which to realize the nanometer size is required in the precision positioning technology. The aerostatic lead screw is considered prominent as one of the most effective tools to realize it. In this study, we tried the ceramic type aerostatic lead screw manufacturing to improve on the positioning error causing the change of environmental temperature. In this paper, we report the cutting know-how of the ceramic male screw and accuracy of said screw.
