Abstract
Typical servo systems often miss operations by electrical noise, and it is very difficult to protect them against electrical noise. Thus it is desired to create an opto-pneumatic system which overcomes the EMS. In this paper, we proposed an opto-pneumatic system. We manufactured an optical bimorph actuator using PLZT elements as an opto-mechanical transducer and investigated its dynamic characteristics. In addition, an algorithm to control its position precisely was constructed on the basis of the experimental results. It is confirmed experimental that the position of the optical actuator coincides with the desired value by applying the algorithm. Experimental results show that the actuator was controlled very well (it followed desired value and did not vibrate). So we'd like to improve its dynamic response and try to construct opto-pneumatic system from now.
