Abstract
Adhesive force between micro parts of MEMS become more important because such resultant force from surface energy are governing. Friction and wear. Therefore it is important to measure and estimate the surface energy that originates in adhesion force of material surfaces to control the friction and wear. Surface energy in a minute area in an MEMS should be measured. But it t was difficult of make the diameter of a liquid drop in the traditional surface energy measurement method below 1 mm. The measurement of the surface energy of a minute area is achieved from a surface energy measurement method using ESEM. So using the ESEM method, we researched the change of surface energy of CNx after friction. Result is that CNx have a tendency that water became to condense on CNx's surface after sliding more than before sliding and CH_2I_2became to condense on CNx surface after sliding less than before sliding.
