A Simulation on a Micropump Using Inertia Effect of the Fluid

Abstract

For fluid microactuators and microfactory, the authors have proposed a novel high output micropump using inertia effect of fluid which has a pipeline element in place of an outlet check valve and verified the effectiveness with a fabricated micropump. To increase the output power and to miniaturize the size, the paper establishes a simple mathematical model with lumped parameters and verifies the effectiveness comparing the simulation and experimental results. Also, the optimal pump structure is investigated through simulations.