To examine the relation between the surface distribution and delamination of thermal sprayed materials, the deformation behavior of SUS304 under increasing load was investigated using the ESPI method. Nect, alumina thermal sprayed SUS304 steel material was investigated by the same method. Then, the results were compared. It is thought that not only the generation of delamination but also the strain hardening of substrate is included in the surface strain when the delamination is found in coating interface. The delamination at the interface between substrate and coating was caused by smaller strain at high temperatures compared with low temperatures, under repeated stress, the surface strain of thermally sprayed coating at the delamination was generated hardly changed, compared with it of substrate.