Abstract
We newly developed a full-reversed bending fatigue tester for evaluating low-cycle fatigue of MEMS materials. This paper focuses on design of the micro fatigue tester based on AFM technique, which can apply tension/compression loads to a microscale specimen of cantilever type, and establishment of the bending fatigue test procedure. The efficacy of the design and driven concept is demonstrated by applying a cyclic loading to the specimen and direct measurement of the applied load of the specimen using a bult-in laser reflection technique. This research succeeded in obtaining an elastic hysteresis loop of microscale specimen.
