A micro abrasive water jet system is constructed as a trial. The constructed system is an abrasive water suspension jet type. The a nozzle diameter is 50 to 100 μm and the maximum jetting pressure of the system is 21 MPa. Experiments are conducted to clarify the flow structure of the jet. Cutting tests are carried out with specimens of copper plate. A compact slurry jet is formed by the constructed system. It is possible to cut a copper plate with a cutting width slightly larger than the jet diameter.