We have demonstrated the operation of a PEFC cell with Ti thin-film gas diffusion layers (GDLs.) The thin-film GDL has been fabricated by using photolithography technique with RIE to create micro-through holes for materials transport. Both temperature and through hole diameter effects have been examined to compare with conventional carbon based GDLs. The thin-film GDL can be a tool for investigating the concentration overpotentials in PEFCs.