2621 Influence of AFM stylus tip on the resist surface
Details
AFM is used to measure the surface of the material with high accuracy. Here we want to use AFM to measure the surface profile of resist. If the measurement object is softer than the stylus, AFM may deform it in measurement. In order to measure the surface profile of resist with high accuracy, it's necessary to investigate the solid-state profiles of resist and influence of the AFM tip on the resist surface. So, in this research, we simulate the relationship between the shape, size and load of the indenter and the deformation with FEM (Finite Element Method), and discuss the influence from the force-displacement curve.
