3302 Development of MgSiO_3 Biocompatible Piezoelectric Film Fabrication Technology

Abstract

In this study, an sputtering technique of a newly designed biocompatible piezoelectric material MgSiO_3 for Bio-MEMS actuator is developed, which has a tetragonal perovskite lattice structure. This crystal structure was designed by using numerical analyses, such as HSAB rule, the geometrical compatibility assessment, and the first principles DFT calculation. We sputtered MgSiO_3 film tetragonal MgSiO_3 perovskite crystal using sputtering method under which crystal grows epitaxially and lattice constant can be controlled. we found an optimum condition of, 1) a substrate temperature 2) a target ratio and 3) an annealing temperature, and confirmed an electric-field-induced strain of a newly sputtered MgSiO_3 film.