Abstract
In order to characterize piezoelectric thin films fabricated on silicon substrate, the relation between displacement response and piezoelectric strain constants have been analyzed by finite element method. At first, the effect of substrate dimensions on deformation was investigated when an electric load was applied to piezoelectric thin film by disc-type electrode. And then, a displacement measuring condition to reduce size dependence was searched by using two parameters, which are the thickness of piezoelectric thin film and the radius of top electrode. Computational results indicated that piezoelectric strain constant d_<33> of thin film has good correlation and its value can be identified with displacement response under the appropriate measuring condition.
