3052 Electric Tests of Scanning Microprobes for Atomic Force Microscopes
Details
The reliability of probes used in atomic force microscopes (AFM) must be increased. Here we report our examination of the electric reliability of two types of scanning microprobes under a small contact weight. One probe was platinum (Pt) coated and the other was made entirely from platinum. After the electric test, the current had melted the Pt-coated probes, but the prototype probe made entirely of platinum was not damaged. This study shows that a probe made of Pt is stronger than those only coated with Pt.
