Abstract
A highly precise actuator which applied to a track following for a high density magnetic recording evaluation system was designed and developed. The actuator called the Nano-motion actuator (NMA) that was consisted of a displacement amplitude mechanism, which was composed of a parallel spring and a lever mechanism, a layered piezoelectric element (PZT). A original NMA has a working distance of 12.5m and the gain crossover frequency of 4.92kHz. The Nano-motion Stage (NMS) that composed of the original NMA and a new translation type of NMA was designed for new scan recoding. In this paper, we evaluted the positioning accuracy of the Nano-motion Stage in a X-Y plane by using lissajous circle and step responses for each axis. As the results, the gain crossover frequency could be reached over 1.6kHz for X and Y axis by PID controller, respectively. However large overshoots and influences of another axis were occured each other, if the overshoots design under 20% of desired value not decreasing,a new controller other than the PID should requiered for the NMS.
